HealthCare-NEMS: Carbon nanotube based nano-electromechanical systems for biomedical sensing

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News from our partner TU Darmstadt

A new technological solution for the production of highly sensitive force sensor on the basis of nano-electromechanical systems (NEMS) was developed at the TU Darmstadt, which enables the miniaturization of active components by a factor of > 103 while increasing their sensitivity compared to conventional systems [1,2,3]. The novel piezoresistive NEMS sensors are based on topologically three-dimensionally arranged carbon nanotube (CNT) architectures. The CNT architectures can be manufactured in a single growth step and electrically contacted to the macro world using a micro/nano-integration technique in order to register a sensor response. The building blocks are biocompatible and also inexpensive to manufacture. In summary, the new sensors have high sensitivity, short response times as well as a robust, flexible, simple and cost-effective design with low power consumption.


This project is granted by the German Federal Ministry of Education and Research (BMBF).


Oktay Yilmazoglu1, Ahid S. Hajo1, Sandeep Yadav2 and Jörg J. Schneider2

1Electrical Engineering and Information Technology, Technical University of Darmstadt
2Inorganic Chemistry, Technical University of Darmstadt


[1] Patent (US 20160178459 A1; DE 10 2014 018 878): „Federsensorelement“; Inventors : O. Yilmazoglu, S. Yadav, D. Cicek und J. Schneider.

[2] Patentanmeldung (DE 102017115330.6): „Anordnung von Kohlenstoffnanoröhren und ein Verfahren zu deren Herstellung“; Inventors: O. Yilmazoglu, S. Yadav, D. Cicek und J. Schneider (Meldung: 10. Juli 2017).

[3] O. Yilmazoglu, S. Yadav, D. Cicek, J. Schneider. „A nano-microstructured artificial-hair-cell-type sensor based on topologically graded 3D carbon nanotube bundles.“ Nanotechnology 27, 365502 (2016).