SIOS Meßtechnik GmbH

SIOS Meßtechnik GmbH is a company which develops and manufactures high-precision analytical instruments. SIOS was founded in 1991 by employees of the institute for process measurement and sensor technology of the Ilmenau technical university. Initially located in the technology and start-up centre of the university, it has had its own operational base in the Ilmenau "Am Vogelherd" technology park, since 1996.

The focal point of the development and production was formed by various series of laser interferometric measurement systems for length, vibration and angle measurement, which were distinguished by the smallest degrees of measurement uncertainty with measurement resolutions in the sub-nanometre range. The systems are used for calibration procedures in a great variety of different areas of precision technology and nanotechnology as well as in research and development. With the rapid development of precision technology and nanotechnology, requirements are also increasing in industrial applications (semiconductor industry, precision machinery construction, measurement equipment industry, automotive industry) for the measurement systems needed. SIOS Meßtechnik GmbH develops and produces laser interferometric measurement systems for this growing market using their core competences. The measurement systems are characterised by a high degree of flexibility with regard to their use, whereby the modular design of the analytical instruments in particular facilitates customer-specific application solutions. Furthermore, the flexible company structure also enables prompt adaptation developments to be implemented.

Today SIOS Meßtechnik GmbH is one of the leading manufacturers of laser interferometric measurement systems and is the most important European supplier of stabilised He-Ne lasers as measurement light sources with highly stable wavelengths. With their nanopositioning and nanomeasurement machine NMM, they are also the supplier of the world's most accurate positioning system and as a result, the sole market leader.


SIOS Meßtechnik GmbH

Am Vogelherd 46
98693 Ilmenau